ASML, the world’s biggest supplier of lithography systems for the semiconductor sector, has expanded a Power Purchase Agreement (PPA) with German power producer RWE in Belgium and the Netherlands.

The initial agreement was signed in 2021 and saw ASML commit to purchasing around 250GWh of power over 10 years from two onshore wind farms and one solar plant in the Netherlands, in addition to an offshore wind farm in Belgium.

The expanded PPA will see ASML offtake approximately 130MW of renewable capacity from the 219MW Belgian Northwester 2 Offshore Wind Farm, as well as wind power from RWE’s wind portfolio in the Netherlands. The portfolio includes the OranjeWind Offshore Wind Farm (795MW), together with the Kattenberg Wind Farm (19MW), Zuidwester Wind Farm (138MW), Westereems Wind Farm (288MW), and Oostpolderdijk Wind Farm (12MW) onshore wind farms.

In addition to the expanded capacity, the PPA has also been extended until 2038.

“We are delighted that ASML continues to rely on RWE as a trusted partner for sustainable energy solutions,” says Ulf Kerstin, chief commercial officer at RWE Supply & Trading. “Increased digitalization is significantly boosting the need for electricity. Large-scale offshore projects like OranjeWind enable us to meet this demand, deliver more carbon-free electricity reliably to the grid, and contribute to a robust and resilient energy system. We already supply numerous leading technology companies in Europe and the US with the energy they need to power innovation.”

The deal with RWE is ASML’s only major PPA in the market to date. Despite the low deal count, the Dutch company has made several major sustainability commitments, including achieving net-zero across its entire value chain by 2040.

RWE has signed several PPAs within the digital infrastructure sector. Most recently, it inked a 110MW offshore wind PPA with AWS in Germany. The deal was built on a Strategic Framework Agreement signed between the two companies in June 2025. The June tie-up saw AWS agree to provide RWE with cloud services to support its digitalization process, as well as support AWS’s drive to power its operations through low-carbon energy sources.